Surface Technology Systems MXP Multiplex ICP ASE HR Silicon Etcher - $215,000 - (Schenectady, NY)
Surface Technology Systems MXP Multiplex ICP ASE HR Silicon Etcher Specifications: Process: Silicon Etch Bosch Wafer size range: 50 mm to 200 mm Set size: 150 mm Loadlock with Edwards E2M40 Vacuum Pump High vacuum pump: Pfeiffer MAG 2000 Roughing vacuum pumps: Edwards IQMB250 and IQDP80 RF Generator: ENI Power Systems ACG-3B and Advanced Energy RFG 3001 Number of gas inputs: 4 Process gases: SF6, C4F8, O2, Air Huber/Unistat 140W Chiller Accessories: ICP V2 - Balun coil Mechanical Clamp Helium Backside Cooling Carousel in MkIV MPX - 2 x 150mm wafers 3KW Source 300/30W platen E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2 Windows 2000 Bosch license CE Marked Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase. Manufactured in 2003.This item has not been tested. The equipment we sell is made fully functional and sold with a 90-day parts warranty, unless stated otherwise. Once an order is received we will go through our testing process. Please contact us via the contact seller link for lead time and additional information. Potential buyers are more than welcome to visit our facility to inspect the equipment prior to purchase. Note that items will not be operational in this instance. We also encourage our customers to visit our facility for the final source inspection and sign off on the equipment being purchased. Payment: We accept PayPal. Payment is to be made within 3 days of auction end. Sales tax: We must collect sales tax for New York and Indiana. New York state residents are required to pay sales tax based on the county of residence. Please wait for the invoice prior to payment so we may invoice the sales tax accordingly. If you choose to pay prior to receiving your invoice you will be charged the sales tax rate of 8.875%. If you are tax exempt please send the necessary document in order for the sales tax to be removed from the invoice. Shipping: Shipping and han…
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From ebay.com - 1 month ago